microscope
Depth-cooled near-infrared camera
1.35x,5x,20x,50x,100x
Electric XYZT
Software Control Analysis System
Detects weak signals down to 100nA level
1.35X Macro Lens
100X High Magnification Imaging
3000V
Laser Mark
Oxide layer leakage, defects
latch-up phenomenon
junction burr